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Surface analysis of reactive ion etched PZT thin films in SF6 plasma

Main Author: Zakar, Eugene.
Corporate Author: U.S. Army Research Laboratory.
Format: Government Document Online Book
Language:English
Published: Adelphi, MD : Army Research Laboratory, [2007]
Series:ARL-TR (Aberdeen Proving Ground, Md.) ; 4284.
Subjects:
Online Access:ONLINE VERSION
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