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Microelectronic test structures for CMOS technology

Bibliographic Details
Main Authors: Bhushan, Manjul., Ketchen, Mark B. (Author)
Corporate Author: Books24x7, Inc.
Format: Online Book
Published: New York : Springer, c2011
Online Access:Online version
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Item Description:Title from title screen.
Format:Mode of access: Internet via World Wide Web.
Bibliography:Includes bibliographical references and index.
ISBN:9781441993779 (electronic )
Access:Electronic access restricted to Villanova University patrons.