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Helium ion microscopy : principles and applications /

Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions such as the Helium Ion Microscope (HIM) are destined to become the imaging tools of choice for the 21st century. Topics covered include th...

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Bibliographic Details
Main Author: Joy, David C., 1943-, (Author)
Corporate Author: SpringerLink (Online service)
Format: Online Book
Published: New York : Springer, 2013.
Series:SpringerBriefs in materials.
Online Access:Online version
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