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Piezoresistor design and applications /

This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelero...

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Bibliographic Details
Main Authors: Doll, Joseph C., (Author), Pruitt, Beth, (Author)
Corporate Author: SpringerLink (Online service)
Format: Online Book
Published: New York, NY : Springer, 2013.
Series:Microsystems and Nanosystems
Online Access:Online version
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