Piezoresistor design and applications /
This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelero...
Main Authors: | , |
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Corporate Author: | |
Format: | Online Book |
Language: | English |
Published: |
New York, NY :
Springer,
2013.
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Series: | Microsystems and Nanosystems
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Subjects: | |
Online Access: | Online version |
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