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Piezoresistor design and applications /
This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelero...
| Main Authors: | , |
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| Format: | Online Book |
| Language: | English |
| Published: |
New York, NY :
Springer,
2013.
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| Series: | Microsystems and Nanosystems
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| Subjects: | |
| Online Access: | Online version |
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