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Calibration service for laser power and energy at 248 nm /

Bibliographic Details
Main Author:	Leonhardt, Rodney W.
Corporate Author:	United States. National Bureau of Standards
Format:	Government Document Online Book
Language:	English
Published:	Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1998.
Series:	NIST technical note ; 1394.
Subjects:	Excimer lasers > Calibration. Lasers > Industrial applications.
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